The POU3500 process offers dynamic temperature Charge of the method chamber cathode / electrode / anode and might be synchronized with any etch process.

30% of its peak energy use, supplying our buyers significant reduction in running costs and enhanced reliability.

With the POU3500, you could realize unprecedented brings about etch functionality, chamber uptime, decreased cost of possession and fab Room utilization – all though improving upon your method trustworthiness.

We embrace personalized accountability and acknowledge accountability for prudent possibility using. We really encourage personalized values, which manual us to persistently meet up with the commitments we make and we endeavor to treat those with whom we connect with respect as we need to be handled ourselves.

LAUDA-Noah will, for just a customer's retrofit analysis, monitor and regulate its fluid temperature Manage profiles to match an present TCUs' if you want to ensure a clean course of action integration by using DAQ.

The accuracy from the POU 3300 permits unbiased control of the procedure fluid temperature towards the wafer chuck in +/- 0.1 °C of set place, and also the rapid response time with the process makes it possible for for optimum wafer-to-wafer repeatability all over the etch procedure.

The precision with the POU 3500 permits unbiased Charge of the procedure fluid temperature towards the wafer chuck inside +/- 0.one °C of set stage, and the quickly response time with the method lets for max wafer-to-wafer repeatability through the etch procedure.

With our device strategically mounted about 6 feet from the chamber, we attain a way more correct looking at from the chuck temperature. This solution assures regular temperature throughout the manufacturing good deal, leading to improved wafer-to-wafer CD uniformity.

huge Footprint: Static units occupy substantial Place within the fabrication Instrument location, minimizing its effectiveness.

Dynamic Temperature Manage, as executed in methods much like the LAUDA-Noah POU, is undoubtedly an method that senses the temperature of the procedure fluid returning from the process chamber’s wafer chuck (ESC) and dynamically adjusts the temperature from the equipped system fluid depending on this serious-time suggestions.

The TEs' can switch directly from heating to cooling, or visa-versa. They can activate & off even though during the heating click here or cooling manner and can maximize or reduce the amount of heating or cooling with out switching in any respect.

in excess of ever, shrinking product geometries, demanding new procedures plus a highly competitive natural environment need temperature Command units that Merge quickly and accurate temperature Command having an emphasis on decreased functioning expenditures and improved trustworthiness.

Confirmed; TEs' symbolize only one Component of a chiller's design and style. The switching & Manage approaches used by a chiller will influence the TEs' trustworthiness.

(thus, putting in a static device next to chamber will likely not empower it to deliver dynamic temperature Manage)

We know that great products are frequently the results of terrific customer responses and the application of innovative engineering. We strive to build value for our consumers via a approach that allows the customer affect our goals, targets, solution developments and business enterprise procedures.